Improvements to the floating double probe for time-resolved measurements in pulsed rf plasmas

✍ Scribed by Smith, Brian A.; Overzet, Lawrence J.

• Book ID: 127333319
• Publisher: American Institute of Physics
• Year: 1998
• Tongue: English
• Weight: 663 KB
• Volume: 69
• Category: Article
• ISSN: 0034-6748
• DOI: 10.1063/1.1148768