Using different carrier gases to control AlN film stress and the effect on morphology, structural properties and optical properties

✍ Scribed by Hu, W G; Liu, X L; Jiao, C M; Wei, H Y; Kang, T T; Zhang, P F; Zhang, R Q; Fan, H B; Zhu, Q S

• Book ID: 125423720
• Publisher: Institute of Physics
• Year: 2007
• Tongue: English
• Weight: 500 KB
• Volume: 40
• Category: Article
• ISSN: 0022-3727
• DOI: 10.1088/0022-3727/40/23/030