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The effects of fluorine on the structural, surface morphology and optical properties of ZnO thin films

✍ Scribed by Fahrettin Yakuphanoglu; Yasemin Caglar; Saliha Ilican; Mujdat Caglar

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 1019 KB
Volume: 394
Category: Article
ISSN: 0921-4526
DOI: 10.1016/j.physb.2007.02.014

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## Abstract Transparent Zinc Oxide (ZnO) thin films have been grown on Si (100) and Sapphire (0001) substrates by RF magnetron sputtering for different growth time intervals (10, 30 and 60 min) to study the substrate and thickness effects. All the films have been grown at a substrate temperature of