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Effect of fluorine doping on structural, electrical and optical properties of ZnO thin films

✍ Scribed by P.M. Ratheesh Kumar; C. Sudha Kartha; K.P. Vijayakumar; F. Singh; D.K. Avasthi


Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
300 KB
Volume
117
Category
Article
ISSN
0921-5107

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Influence of substrate and film thicknes
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## Abstract Transparent Zinc Oxide (ZnO) thin films have been grown on Si (100) and Sapphire (0001) substrates by RF magnetron sputtering for different growth time intervals (10, 30 and 60 min) to study the substrate and thickness effects. All the films have been grown at a substrate temperature of