𝔖 Bobbio Scriptorium
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Use of total Reflection X-ray Fluorescence Analysis in the life sciences

✍ Scribed by Peter Wobrauschek


Book ID
112936389
Publisher
Humana Press Inc
Year
1994
Tongue
English
Weight
381 KB
Volume
43-45
Category
Article
ISSN
0163-4984

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This paper reviews and discusses the error factors in quantitative total reflection x-ray fluorescence analysis, primarily with regard to the surface contamination of silicon wafers. The error factors were classified into three origins: instrumental, sample and data processing. The instrumental erro