Use of a photoresist sacrificial layer with SU-8 electroplating mould in MEMS fabrication

✍ Scribed by Song, In-hyouk; Ajmera, Pratul K

• Book ID: 127032424
• Publisher: Institute of Physics
• Year: 2003
• Tongue: English
• Weight: 828 KB
• Volume: 13
• Category: Article
• ISSN: 0960-1317
• DOI: 10.1088/0960-1317/13/6/304