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Universal quantification of elastic scattering effects in AES and XPS

โœ Scribed by Aleksander Jablonski

Book ID
116068898
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
1010 KB
Volume
364
Category
Article
ISSN
0039-6028

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Evaluation of validity of the depth-depe
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โœ Jablonski, A.; Tougaard, S. ๐Ÿ“‚ Article ๐Ÿ“… 1998 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 361 KB ๐Ÿ‘ 2 views

Elastic electron scattering in XPS and AES vary considerably with depth of origin of emitted electrons. To account for this, we introduced in a recent paper a simple correction factor CF. The function CF is the ratio of emitted peak intensity from a layer of atoms located at a given depth in a solid

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A new method for non-destructive quantitative analysis of surface nanostructures was developed in recent years. It relies on analysis of the XPS peak shape and usually the e โ€ ects of elastic electron scattering are neglected in practical applications of the method. In the present paper we study the