Evaluation of validity of the depth-dependent correction formula (CF) for elastic electron scattering effects in AES and XPS
✍ Scribed by Jablonski, A.; Tougaard, S.
- Publisher
- John Wiley and Sons
- Year
- 1998
- Tongue
- English
- Weight
- 361 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0142-2421
No coin nor oath required. For personal study only.
✦ Synopsis
Elastic electron scattering in XPS and AES vary considerably with depth of origin of emitted electrons. To account for this, we introduced in a recent paper a simple correction factor CF. The function CF is the ratio of emitted peak intensity from a layer of atoms located at a given depth in a solid calculated from theories that take into account and neglect elastic electron scattering. The observed depth dependence of CF is well described by a simple analytical formula that depends only on the inelastic and the transport mean free paths. In the present paper the limits of validity of the formula are determined by comparison to results of extensive Monte Carlo simulations. It is found to be valid for most XPS and AES peaks provided that the angle of emission is AE30Ä and the angle between x-ray anode and analyser axis is 45-65Ä. The procedure for application of CF in practical surface analysis is also discussed.