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Uniformity in HgCdTe diode arrays fabricated by reactive ion etching

✍ Scribed by R. Pal; P. K. Chaudhury; B. L. Sharma; V. Kumar; C. Musca; J. M. Dell; L. Faraone


Book ID
107453295
Publisher
Springer US
Year
2004
Tongue
English
Weight
107 KB
Volume
33
Category
Article
ISSN
0361-5235

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Fabrication of refractive microlenses in
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Refractive microlenses are formed in semiconductor materials by transfer of a lens-like shape of reflowed erodable polyimide mask into the substrate by reactive ion etching. Simultaneous monitoring of the etch rates of the mask material and the semiconductor results in precise control of the lens ra