Ane electron beam system to fabricate in
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Stephen J. Angello
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Article
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1973
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Elsevier Science
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English
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The tzaxmnnk of integraled circuits makea it likely that th hi&& pmibls circzlit densities will be attempted in manufacture. Reueom are g&&n fw the tm of electma beams in&eud of Zigti fw th.e muking procedures in making d&grated &mite. The beet total eye&??3 wiu con&t of two m@w subeysteme. One. wil