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Ultrananocrystalline and Nanocrystalline Diamond Thin Films for MEMS/NEMS Applications

✍ Scribed by Sumant, Anirudha V. (author);Auciello, Orlando (author);Carpick, Robert W. (author);Srinivasan, Sudarsan (author);Butler, James E. (author)

Book ID
120834373
Publisher
Materials Research Society
Year
2010
Tongue
English
Weight
726 KB
Volume
35
Category
Article
ISSN
0883-7694

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## Abstract The structural, optical, and electronic properties of nanocrystalline diamond thin films grown from a hydrogen‐rich CH~4~/H~2~ gas phase via hot filament (HF) CVD and of ultrananocrystalline diamond thin films grown from an argon‐rich sp^2^ gas phase via microwave plasma enhanced (MPE)