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Materials science and fabrication processes for a new MEMS technology based on ultrananocrystalline diamond thin films

✍ Scribed by Auciello, Orlando; Birrell, James; Carlisle, John A; Gerbi, Jennifer E; Xiao, Xingcheng; Peng, Bei; Espinosa, Horacio D

Book ID: 120821889
Publisher: Institute of Physics
Year: 2004
Tongue: English
Weight: 572 KB
Volume: 16
Category: Article
ISSN: 0953-8984
DOI: 10.1088/0953-8984/16/16/R02

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