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Mechanical characterization and stress engineering of nanocrystalline diamonds films for MEMS applications

✍ Scribed by Hernández Guillén, F.J.; Janischowsky, Klemens; Kusterer, Joachim; Ebert, Wolfgang; Kohn, Erhard

Book ID: 121431553
Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 387 KB
Volume: 14
Category: Article
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2004.12.061

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