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Fabrication and characterization of stress-free microbeams for MEMS applications

✍ Scribed by V. I. Shashkin; N. V. Vostokov; E. A. Vopilkin; A. Yu. Klimov; V. M. Daniltsev; V. V. Rogov; S. G. Lazarev

Publisher: John Wiley and Sons
Year: 2005
Tongue: English
Weight: 398 KB
Volume: 2
Category: Article
ISSN: 1862-6351
DOI: 10.1002/pssc.200460481

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