Fabrication and characterization of SiO2 microcantilever for microsensor application

✍ Scribed by Yanjun Tang; Ji Fang; Xiaodong Yan; Hai-Feng Ji

• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 198 KB
• Volume: 97
• Category: Article
• ISSN: 0925-4005
• DOI: 10.1016/j.snb.2003.08.003

✦ Synopsis

SiO 2 microcantilevers were developed to improve the sensitivity of microcantilever sensors. Silicon plasma dry etching technique was employed to release SiO 2 cantilever from bulk silicon at high rate using an ordinary 2 m thickness of SiO 2 covered silicon wafer. The V-shaped microcantilever is 200 m long, 25 m wide, and 2 m thick. The spring constant of the cantilevers was measured to be 0.104 N/m. Significant deflection amplitude of the microcantilever was observed upon exposure of low concentration of aminoethanethiol due to its low spring constant.