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Analytical control of the preparation and the chemical grafting of Si/SiO2 heterostructures. Application to the fabrication of silicon microsensors

✍ Scribed by Yolanda Duvault-Herrera; Nicole Jaffrezic-Renault; Dominique Morel; Joseph Serpinet; Jean-Louis Duvault; Guy Hollinger

No coin nor oath required. For personal study only.

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