Ultra-shallow junction formation by B18H22 ion implantation

✍ Scribed by Y. Kawasaki; T. Kuroi; T. Yamashita; K. Horita; T. Hayashi; M. Ishibashi; M. Togawa; Y. Ohno; M. Yoneda; Tom Horsky; Dale Jacobson; Wade Krull

• Book ID: 103860241
• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 225 KB
• Volume: 237
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2005.04.073