✦ LIBER ✦

Formation of shallow P+N junctions by dual F+B+ implantation

✍ Scribed by B. Biasse; A.M. Cartier; P. Spinelli; M. Bruel

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Formation of shallow P+-N junctions by d

✍ A. Ferreiro; B. Biasse; A.M. Papon; J. Pontcharra; R. Truche 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 576 KB

Shallow junction formation by dual Ge/B,

✍ V. Hašlar; P. Seidl; P. Hazdra; R. Gwilliam; B. Sealy 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 331 KB

Formation of Shallow p+ -n Junctions by

✍ Bao, Xi-Mao ;Yan, Hai ;Mao, Bao-Hua 📂 Article 📅 1993 🏛 John Wiley and Sons 🌐 English ⚖ 278 KB

Ultra-shallow P+/N junctions formed by r

✍ Henley L. Liu; Steven S. Gearhart; John H. Booske; Wei Wang 📂 Article 📅 1998 🏛 Springer US 🌐 English ⚖ 109 KB

Formation and characterizations of ultra

✍ G.Y. Jeon; J.S. Kim; C.N. Whang; S. Im; J.-H. Song; J.H. Song; W.K. Choi; H.K. K 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 270 KB

Ultra-shallow junction formation by B18H

✍ Y. Kawasaki; T. Kuroi; T. Yamashita; K. Horita; T. Hayashi; M. Ishibashi; M. Tog 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 225 KB