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Ultra-high quality factor planar Si_3N_4 ring resonators on Si substrates

✍ Scribed by Tien, Ming-Chun; Bauters, Jared F.; Heck, Martijn J. R.; Spencer, Daryl T.; Blumenthal, Daniel J.; Bowers, John E.

Book ID: 115414236
Publisher: Optical Society of America
Year: 2011
Tongue: English
Weight: 952 KB
Volume: 19
Category: Article
ISSN: 1094-4087
DOI: 10.1364/OE.19.013551

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