Growth of ฮณ-Al2O3 thin films on silicon
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S.S. Yom; W.N. Kang; Y.S. Yoon; J.I. Lee; D.J. Choi; T.W. Kim; K.Y. Seo; P.H. Hu
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Article
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1992
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Elsevier Science
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English
โ 298 KB