𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Two-dimensional solid-solution formation of Y-containingα-Si3N4

✍ Scribed by Doris Stutz; Peter Greil; Günter Petzow


Publisher
Springer
Year
1986
Tongue
English
Weight
310 KB
Volume
5
Category
Article
ISSN
0261-8028

No coin nor oath required. For personal study only.


📜 SIMILAR VOLUMES


Fabrication and optical characterization
✍ N. Daldosso; M. Melchiorri; F. Riboli; F. Sbrana; L. Pavesi; G. Pucker; C. Kompo 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 255 KB

In view of the integration within Si-based optical devices, LPCVD (low-pressure chemical vapor deposition) thin-film Si 3 N 4 waveguides have been fabricated on a Si substrate within a CMOS fabrication pilot-line. Different structures (channel, rib and strip-loaded) were designed, fabricated and cha