✦ LIBER ✦

Two-Dimensional Nucleation of Cubic and 6H Silicon Carbide

✍ Scribed by Vasiliauskas, Remigijus; Syväjärvi, Mikael; Beshkova, Milena; Yakimova, Rositza

Book ID: 120793403
Publisher: Trans Tech Publications, Ltd.
Year: 2009
Tongue: English
Weight: 561 KB
Volume: 615-617
Category: Article
ISSN: 1662-9752
DOI: 10.4028/www.scientific.net/MSF.615-617.189

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Low resistivity (∼10-5 Ω cm2) ohmic cont

Low resistivity (∼10-5 Ω cm2) ohmic contacts to 6H silicon carbide fabricated using cubic silicon carbide contact layer

✍ Dmitriev, V. A.; Irvine, K.; Spencer, M.; Kelner, G. 📂 Article 📅 1994 🏛 American Institute of Physics 🌐 English ⚖ 585 KB

Oxidation of 6H-α Silicon Carbide Platel

Oxidation of 6H-α Silicon Carbide Platelets

✍ RICHARD C. A. HARRIS 📂 Article 📅 1975 🏛 John Wiley and Sons 🌐 English ⚖ 336 KB

Creep of 6H α-Silicon Carbide Single Cry

Creep of 6H α-Silicon Carbide Single Crystals

✍ Gregory S. Corman 📂 Article 📅 1992 🏛 John Wiley and Sons 🌐 English ⚖ 407 KB

Admittance Spectroscopy of 6H, 4H, and 1

Admittance Spectroscopy of 6H, 4H, and 15R Silicon Carbide

✍ Smith, S. R. ;Evwaraye, A. O. ;Mitchel, W. C. 📂 Article 📅 1997 🏛 John Wiley and Sons 🌐 English ⚖ 275 KB 👁 2 views

Thermal conductivity and electrical prop

Thermal conductivity and electrical properties of 6H silicon carbide

✍ Burgemeister, E. A.; von Muench, W.; Pettenpaul, E. 📂 Article 📅 1979 🏛 American Institute of Physics 🌐 English ⚖ 535 KB

CVD growth and characterization of singl

CVD growth and characterization of single-crystalline 6H silicon carbide

✍ S. Karmann; C. Haberstroh; F. Engelbrecht; W. Suttrop; A. Schöner; M. Schadt; R. 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 352 KB

## Homoepitaxial growth of 6H-SiC layers is performed at 1600°C using propane and silane as source gases. The influence of the growth parameters, temperature and gas concentrations on the growth rate is discussed. The films are examined by structural, optical and electrical characterization techni