𝔖 Bobbio Scriptorium
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Oxidation of 6H-α Silicon Carbide Platelets

✍ Scribed by RICHARD C. A. HARRIS


Book ID
110814085
Publisher
John Wiley and Sons
Year
1975
Tongue
English
Weight
336 KB
Volume
58
Category
Article
ISSN
0002-7820

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Thin oxide growth on 6H-silicon carbide
✍ Vickram R. Vathulya; William E. Wagner; Floyd C. Miller; Marvin H. White 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 249 KB

A marked difference is observed for the initial oxidation rates of 6H-SiC (silicon face) obtained with oxygen and argon as carrier gases in a wet oxidation process. A modified Deal-Grove model with surface and bulk reaction constants is presented to model the early oxidation process at the SiO2-SiC