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Two-dimensional model of impurity diffusion in polysilicon-silicon structures

✍ Scribed by A.D. Sadovnikov; A.V. Tchernyaev

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 840 KB
Volume: 35
Category: Article
ISSN: 0038-1101
DOI: 10.1016/0038-1101(92)90060-p

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