One-dimensional modeling of high concentration boron diffusion in polysilicon-silicon structures : A. D. Sadovnikov. Solid-St. Electron.34(9), 969 (1991)

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 125 KB
• Volume: 32
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(92)90601-g