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Two-dimensional density distribution of metastable atoms in an inductively coupled plasma in Ar

✍ Scribed by Tadokoro, Masahiro; Hirata, Hajime; Nakano, Nobuhiko; Petrović, Zoran Lj.; Makabe, Toshiaki


Book ID
126826775
Publisher
The American Physical Society
Year
1998
Tongue
English
Weight
687 KB
Volume
58
Category
Article
ISSN
1063-651X

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