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Tuning the dielectric properties of hafnium silicate films

✍ Scribed by Christian Fachmann; Lothar Frey; Stephan Kudelka; Tim Boescke; Stefan Nawka; Elke Erben; Theodor Doll


Book ID
104051705
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
720 KB
Volume
84
Category
Article
ISSN
0167-9317

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