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Transport of sputtered atoms in facing targets sputtering geometry: A numerical simulation study

โœ Scribed by Senthil Nathan, S.; Mohan Rao, G.; Mohan, S.


Book ID
121502993
Publisher
American Institute of Physics
Year
1998
Tongue
English
Weight
376 KB
Volume
84
Category
Article
ISSN
0021-8979

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