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Transport and Deposition of Plasma-Sputtered Platinum Atoms: Comparison Between Experiments and Simulation

✍ Scribed by Caillard, AmaËl; Charles, Christine; Boswell, Rod W.; Brault, Pascal

Book ID
127138071
Publisher
IEEE
Year
2008
Tongue
English
Weight
239 KB
Volume
36
Category
Article
ISSN
0093-3813

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An algorithm for Monte Carlo simulation of sputtered atom transport during ion-plasma sputtering was developed. The experimentally determined initial energy distribution of sputtered atoms, the influence of the background gas mixture and the real equipment geometry of the magnetron sputtering system