Substrate effect on mechanical character
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Yi-Chung Huang; Shou-Yi Chang
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Article
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2010
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Elsevier Science
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English
β 545 KB
The measurements of thin-film mechanical properties are generally influenced by the elastic and plastic responses of substrates and consequently may be inaccurate. Thus in this study, the effects of three different substrates, including sapphire, glass and polyimide, on the mechanical characterizati