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Epitaxial Aluminum-Doped Zinc Oxide Thin Films on Sapphire: I, Effect of Substrate Orientation

โœ Scribed by V Srikant; Valter Sergo; David R. Clarke


Book ID
110827052
Publisher
John Wiley and Sons
Year
1995
Tongue
English
Weight
437 KB
Volume
78
Category
Article
ISSN
0002-7820

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Substrate effect on mechanical character
โœ Yi-Chung Huang; Shou-Yi Chang ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 545 KB

The measurements of thin-film mechanical properties are generally influenced by the elastic and plastic responses of substrates and consequently may be inaccurate. Thus in this study, the effects of three different substrates, including sapphire, glass and polyimide, on the mechanical characterizati