𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Transparent conducting Ga-doped ZnO thin films grown by reactive co-sputtering of Zn and GaAs

✍ Scribed by Singh, Devendra; Singh, S.; Kumar, Uttam; Srinivasa, R.S.; Major, S.S.


Book ID
122248294
Publisher
Elsevier Science
Year
2014
Tongue
English
Weight
519 KB
Volume
555
Category
Article
ISSN
0040-6090

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES


Helicon-wave-excited plasma sputtering d
✍ Sugiyama, Mutsumi ;Murayama, Akira ;Imao, Takashi ;Saiki, Keita ;Nakanishi, Hisa πŸ“‚ Article πŸ“… 2006 πŸ› John Wiley and Sons 🌐 English βš– 405 KB

## Abstract Sputtering deposition of Ga‐doped ZnO (ZnO:Ga) thin films was carried out using the helicon‐wave‐excited plasma sputtering (HWPS) method. The films sputtered above 150 Β°C had a preferential {0001} orientation. According to the surface‐damage‐free nature, the films having featureless sur