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Transparent conductive ZnO:Al films by reactive co-sputtering from separate metallic Zn and Al targets

✍ Scribed by F. Fenske; W. Fuhs; E. Nebauer; A. Schöpke; B. Selle; I. Sieber


Book ID
114086693
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
401 KB
Volume
343-344
Category
Article
ISSN
0040-6090

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