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Transparent conducting Al and Y codoped ZnO thin film deposited by DC sputtering

โœ Scribed by Yu-Zen Tsai; Na-Fu Wang; Mei-Rurng Tseng; Feng-Hao Hsu

Book ID
113783619
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
536 KB
Volume
123
Category
Article
ISSN
0254-0584

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โœ Amit Kumar; Manoj Kumar; Beer Pal Singh ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 494 KB

Al and N codoped ZnO thin films were grown on n-Si (100) substrate by sputtering technique. Hall effect measurements of as-grown films exhibited n-type conduction, however 500 ยฐC Ar annealed codoped films showed p-type conductivity with a hole concentration of 9.9 ร— 10 16 cm -3 , resistivity of 15.9