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Transparent conducting Si-codoped Al-doped ZnO thin films prepared by magnetron sputtering using Al-doped ZnO powder targets containing SiC

✍ Scribed by J. Nomoto; T. Miyata; T. Minami

Book ID: 121656102
Publisher: AVS (American Vacuum Society)
Year: 2009
Tongue: English
Weight: 689 KB
Volume: 27
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.3153284

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