Transmission electron microscopy study of Au/ZrB2/Ag(Te) contacts to GaSb
✍ Scribed by J. Kątcki; A. Łaszcz; J. Ratajczak; F. Phillipp; M. Guziewicz; A. Piotrowska
- Book ID
- 114193477
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 298 KB
- Volume
- 81
- Category
- Article
- ISSN
- 0254-0584
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## Abstract Formation of Ag~2~Te thin films from room temperature (300 K) solid state reaction of Ag and Te thin film couples is investigated. Rutherford Backscattering Spectrometry (RBS) studies confirmed the complete miscibility of the couples and the stoichiometry of the resulting Ag~2~Te. Struc
7he morphology of a nickel (5 nm), gold (45 nm), germanium (20 nm) ohmic contact to GaAs with a ZrB 2 (50nm) diffusion barrier, annealed to temperatures between 355 and 485 °C, was studied by transmission electron microscopy. The barrier was found to remain intact and unreacted after annealing. The