๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Transmission Electron Microscopy of Silicon VLSI Circuits and Structures

โœ Scribed by Barber, D.J.

Book ID
118680409
Publisher
The Institution of Electrical Engineers
Year
1984
Weight
202 KB
Volume
30
Category
Article
ISSN
0013-5127

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Cross-sectional transmission electron mi
Cross-sectional transmission electron microscopy of silicon LSI circuits and josephson junction devices
โœ Du, A. Y. ;Chu, Y. M. ๐Ÿ“‚ Article ๐Ÿ“… 1987 ๐Ÿ› Wiley (John Wiley & Sons) ๐ŸŒ English โš– 429 KB

Cross-sectional transmission electron microscopy (XTEM) has been used to diagnose silicon LSI circuits and Josephson junction devices. For LSI circuits, some typical failure problems have been presented. For Nb-Si-Nb Josephson junction, microholes in the thin silicon layer have observed, and they ar