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Book review: Transmission Electron Microscopy of Silicon VLSI Circuits and Structures

โœ Scribed by Ahmed, H.

Book ID
114454146
Publisher
The Institution of Electrical Engineers
Year
1985
Weight
153 KB
Volume
132
Category
Article
ISSN
0143-7100

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๐Ÿ“œ SIMILAR VOLUMES

Cross-sectional transmission electron mi
Cross-sectional transmission electron microscopy of silicon LSI circuits and josephson junction devices
โœ Du, A. Y. ;Chu, Y. M. ๐Ÿ“‚ Article ๐Ÿ“… 1987 ๐Ÿ› Wiley (John Wiley & Sons) ๐ŸŒ English โš– 429 KB

Cross-sectional transmission electron microscopy (XTEM) has been used to diagnose silicon LSI circuits and Josephson junction devices. For LSI circuits, some typical failure problems have been presented. For Nb-Si-Nb Josephson junction, microholes in the thin silicon layer have observed, and they ar