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Transformation of titanium nitride in oxygen plasma

✍ Scribed by C. Jiménez; J. Perrière; C. Palacio; J.P. Enard; J.M. Albella

Book ID: 107864291
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 360 KB
Volume: 228
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(93)90609-s

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