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Oxidation mechanism of titanium nitride in oxygen

✍ Scribed by Jean Desmaison; Pierre Lefort; Michel Billy

Publisher
Springer-Verlag
Year
1979
Tongue
English
Weight
623 KB
Volume
13
Category
Article
ISSN
0030-770X

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## Abstract Titanium nitridation has been achieved in a tubular reactor under a radio frequency low‐pressure plasma. The influence of the plasma working parameters (substrate temperature, nature of the gas phase and plasma input power) on the superficial nitride/oxide ratio has been investigated. T