Role of oxygen contamination on titanium nitriding

✍ Scribed by P. Saillard; A. Gicquel; J. Amouroux; N. Moncoffre; J. Tousset

• Publisher: John Wiley and Sons
• Year: 1990
• Tongue: English
• Weight: 481 KB
• Volume: 16
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/sia.7401601110

✦ Synopsis

Abstract

Titanium nitridation has been achieved in a tubular reactor under a radio frequency low‐pressure plasma. The influence of the plasma working parameters (substrate temperature, nature of the gas phase and plasma input power) on the superficial nitride/oxide ratio has been investigated. The influence of the oxygen bulk contamination on nitridation kinetics is also reported.