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Transfer of InP epilayers by wafer bonding

✍ Scribed by Klas Hjort

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📜 SIMILAR VOLUMES

Si layer transfer to InP substrate using

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Room temperature GaAsSi and InPSi wafe

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✍ Grzesik, M.; Vangala, S. R.; Goodhue, W. D. 📂 Article 📅 2013 🏛 Springer US 🌐 English ⚖ 455 KB