TP-A6 chemical-vapor-deposited silicon nitride: Effects of the NH3/SiH4ratio on MNOS memory

✍ Scribed by Stein, H.J.; Wells, V.A.

• Book ID: 114592880
• Publisher: IEEE
• Year: 1978
• Tongue: English
• Weight: 164 KB
• Volume: 25
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/t-ed.1978.19319