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Top-bottom effect in energy-selecting transmission electron microscopy

โœ Scribed by L. Reimer; M. Ross-Messemer


Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
327 KB
Volume
21
Category
Article
ISSN
0304-3991

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The resolution of electron energy loss spectroscopy (EELS) is limited by delocalization of inelastic electron scattering rather than probe size in an aberration corrected scanning transmission electron microscope (STEM). In this study, we present an experimental quantification of EELS spatial resolu