TOF-RBS with medium energy heavy ion probe for semiconductor process analysis

✍ Scribed by Kei Hayashi; Hirosuke Takayama; Masao Ishikawa; Satoshi Abo; Tivadar Lohner; Mikio Takai

• Book ID: 113822952
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 302 KB
• Volume: 219-220
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2004.01.125