✦ LIBER ✦

Medium energy nuclear microprobe with enhanced sensitivity for semiconductor process analysis

✍ Scribed by J Tajima; S Kado; Y.K Park; R Mimura; M Takai

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Application of medium energy nuclear mic

✍ Mikio Takai; Takehisa Kishimoto; Ryou Mimura; Hiroshi Sawaragi; Ryuso Aihara 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 422 KB

Medium energy ion-nanoprobe with TOF-RBS

✍ K. Iwasaki; J. Tajima; H. Takayama; F. Pászti; M. Takai 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 284 KB

TOF-RBS with medium energy heavy ion pro

✍ Kei Hayashi; Hirosuke Takayama; Masao Ishikawa; Satoshi Abo; Tivadar Lohner; Mik 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 302 KB