✦ LIBER ✦

Medium energy ion-nanoprobe with TOF-RBS for semiconductor process analysis

✍ Scribed by K. Iwasaki; J. Tajima; H. Takayama; F. Pászti; M. Takai

Book ID: 114165590
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 284 KB
Volume: 190
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(01)01319-2

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

TOF-RBS with medium energy heavy ion pro

TOF-RBS with medium energy heavy ion probe for semiconductor process analysis

✍ Kei Hayashi; Hirosuke Takayama; Masao Ishikawa; Satoshi Abo; Tivadar Lohner; Mik 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 302 KB

Development of nanoprobe TOF-RBS system

Development of nanoprobe TOF-RBS system for semiconductor process

✍ H. Takayama; K. Iwasaki; K. Hayashi; M. Takai 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 130 KB

Medium energy nuclear microprobe with en

Medium energy nuclear microprobe with enhanced sensitivity for semiconductor process analysis

✍ J Tajima; S Kado; Y.K Park; R Mimura; M Takai 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 197 KB

Modification of a pulsed 14-MeV fast neu

Modification of a pulsed 14-MeV fast neutron generator to a medium-energy ion accelerator for TOF-RBS application

✍ P. Junphong; D. Suwannakachorn; L.D. Yu; S. Singkarat 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 812 KB

A B-TOF mass spectrometer for the analys

A B-TOF mass spectrometer for the analysis of ions with extreme high start-up energies

✍ M. Lezius 📂 Article 📅 2002 🏛 John Wiley and Sons 🌐 English ⚖ 176 KB

## Abstract Weak magnetic deflection is combined with two acceleration stage time‐of‐flight mass spectrometry and subsequent position‐sensitive ion detection. The experimental method, called B‐TOF mass spectrometry, is described with respect to its theoretical background and some experimental resul