𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Titanium nitride deposition in an r.f. discharge

✍ Scribed by Mitsuharu Konuma; Yasushi Kanzaki; Osamu Matsumoto


Book ID
116013824
Publisher
Elsevier Science
Year
1980
Weight
331 KB
Volume
75
Category
Article
ISSN
0022-5088

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES


R.F. plasma deposition of silicon nitrid
✍ M.J. Helix; K.V. Vaidyanathan; B.G. Streetman; H.B. Dietrich; P.K. Chatterjee πŸ“‚ Article πŸ“… 1978 πŸ› Elsevier Science 🌐 English βš– 322 KB