Temperature conditions during arc discharge plasma deposition of titanium nitride

✍ Scribed by S. Tamulevicˇius; K. Babilius; A. Matiukas

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 348 KB
• Volume: 71
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/0257-8972(94)02324-j