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Titanium density analysed by optical absorption and emission spectroscopy in a dc magnetron discharge

✍ Scribed by Gaillard, M; Britun, N; Kim, Yong M; Han, Jeon G

Book ID: 121482342
Publisher: Institute of Physics
Year: 2007
Tongue: English
Weight: 688 KB
Volume: 40
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/40/3/018

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